SP63X Piezo Stage, X Direction, Stroke 8 µm

Model

SP63.X7S

SP63.X7K

Units

Active axes

X

See S

Sensor

SGS

–

Nominal travel range （0 ~+120 V）

5.5

See S

µm±20%

Max. travel range（-20~+150 V）

8/axis

See S

µm±20%

Resolution

0.2

0.1

nm

Closed-loop linearity

0.2

–

%F.S.

Repeatability

0.1

–

%F.S.

Push/pull force capacity

10/2

See S

N

Stiffness

1.5

See S

N/mm±20%

Load capacity

800

See S

g

Electrical capacitance

0.8

See S

μF±20%

Unloaded resonant frequency

2

See S

KHz±20%

Material

Aluminum

See S

Weight

70

See S

g±5%

Cable length

1.5

See S

m±10mm